Lsi package provided with interface module

ABSTRACT

A LSI package encompasses: an interposer having board-connecting joints, which facilitate connection with a printed wiring board, and module-connecting terminals, part of the module-connecting terminals are assigned as interposer-site monitoring terminals; a signal processing LSI mounted on the interposer; and an I/F module having a plurality of interposer-connecting terminals, which are arranged to correspond to arrangement of the module-connecting terminals, and a transmission line to establish an external interconnection of signal, which is transmitted from the signal processing LSI, part of the interposer-connecting terminals are assigned as module-site monitoring terminals. The interposer-site and module-site monitoring terminals are configured to flow a monitoring current to confirm electric contact between the signal processing LSI and the I/F module.

CROSS REFERENCE TO RELATED APPLICATIONS AND INCORPORATED BY REFERENCE

This application is a divisional of and claims the benefit of priorityunder 35 USC §120 from U.S. Ser. No. 11/015,013, filed Dec. 20, 2004 andis based upon and claims the benefit of priority under 35 USC §119 fromthe Japanese Patent Application No. P2003-435836 filed Dec. 26, 2003,the entire contents of which are incorporated by reference herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an LSI package provided with aninterface (I/F) module, an interposer and an I/F module which are usedin the LSI package, a signal processing LSI mounted on the interposer soas to implement the LSI package, a monitoring circuit of the LSI packageconfigured to monitor an electrical connection between the signalprocessing LSI and the I/F module.

2. Description of the Related Art

With improvements in performance of semiconductor active elements suchas bipolar transistors and field-effect transistors, the remarkabledevelopments of operation speed is attempted in large scale integratedcircuits for signal processing (hereinafter described “signal processingLSI”). However, the operation speed on a board level, or a printedcircuit board mounting the signal processing LSI, is still lower thanthe operation speed in the signal processing LSI, although the operationspeed in the signal processing LSI is inherently high, and further, on arack level packaging hierarchy implemented by the printed circuitboards, the operation speed becomes further lower. The above-mentionedoperation speed problems are caused by increases in transmission loss,noise, and electromagnetic interference associated with the electricalinterconnections, which increase more and more as the operationfrequency becomes higher. Namely, it is inevitable that as the wiringlength becomes long, the operating frequency decreases so as to ensurethe signal quality. Therefore, such a tendency the packaging technologylimits the operation speed of the system rather than the operation speedof the signal processing LSI, has become more and more significantrecently in the electrically interconnected device.

Taking such problem in the electrically interconnected device intoconsideration, optically interconnected devices configured to establishcommunications between signal processing LSIs by optical interconnectionare proposed. In the optical interconnection, since the frequencydependence of losses, the electromagnetic interference in thedistribution lines and noise associated with ground potentialfluctuation can be ignored in a frequency range from direct current to ahigh frequency band over 100 GHz, communication of Gbps can be easilyrealized. Such optically interconnected device establishingcommunications between signal processing LSIs by optical interconnectionis disclosed, for instance, in NIKKEI ELECTRONICS, No. 810, pp121-122,Dec. 3, 2001, in which an I/F module adapted for external connection ofhigh-speed signals is directly mounted on an interposer, on which asignal processing LSI is mounted, is proposed.

In the above-mentioned earlier technology, it is difficult to mount aninterposer on a board in an actual interposer mounting process, sincethe mounting of the interposer on the board is carried out in acondition where the interposer is mingled with the I/F module.

For instance, since the I/F module has an optical transmission line suchas an optical fiber, etc, it is not possible to give heat treatment byputting the optical fiber into a solder reflow furnace of the interposeras it is. The problem is not limited to a case in which the opticaltransmission line is employed, since the same problem arises when anelectrical transmission line such as a small coaxial cable is used forthe transmission line.

Then, in NIKKEI ELECTRONICS, the optical transmission line is formed sothat it can be detached from the I/F module by a detachable opticalconnector. However, in the detachable optical connector methodology,protectors for protecting optical semiconductor elements and opticalconnectors from mechanical damage and pollution are required. And, inaddition, various architectures for lowering the process temperature soas to prevent thermal deformation of joints of the optical connector andfor shortening the processing time are required. Because of theserequirements, there was a problem being that the mounting condition ofother parts which are supposed to be mounted on the same board does notmeet with the mounting condition of the I/F module and that existingboard assembly equipment are not able to be applied to as they are.Furthermore, the configuration becomes more and more complicated becausepressure mechanism and holding mechanism of the optical connector mustbe provided in the detachable optical connector methodology, and themanufacturing cost drastically increases.

SUMMARY OF THE INVENTION

In view of these situations, it is an object of the present invention toprovide an LSI package provided with an I/F module which can bemanufactured through the existing production line and is not accompaniedby extremely complicated configuration, and to provide an interposer andan I/F module which are used in the LSI package, a signal processing LSImounted on the interposer so as to implement the LSI package, amonitoring circuit of the LSI package configured to monitor electricalconnection between the signal processing LSI and the I/F module.

A feature of the present invention may inhere in a LSI package mountableon a printed wiring board, comprising: an interposer having a pluralityof board-connecting joints, which facilitate connection with the printedwiring board, and a plurality of module-connecting terminals, part ofthe module-connecting terminals are assigned as first monitoringterminals and another part of the module-connecting terminals areassigned as first electric joints; a signal processing LSI mounted onthe interposer; and an interface module having a plurality ofinterposer-connecting terminals, which are arranged to correspond toarrangement of the module-connecting terminals, and a transmission lineto establish an external interconnection of signal, which is transmittedfrom the signal processing LSI, part of the interposer-connectingterminals are assigned as second monitoring terminals and another partof the interposer-connecting terminals are assigned as second electricjoints, wherein the first and second monitoring terminals are configuredto flow a monitoring current to confirm electrical connection betweenthe signal processing LSI and the interface module.

Another feature of the present invention may inhere in an interposerincluded in an LSI package, the LSI package further including a signalprocessing LSI mounted on the interposer and an interface module havinga transmission line configured to establish an external interconnectionof signal, which is transmitted through the interposer, the interposercomprising: a plurality of module-connecting terminals configured tomechanically and electrically connect with a plurality ofinterposer-connecting terminals provided on the interface module, partof the module-connecting terminals are assigned as monitoring terminals,through which a monitoring current to confirm electrical connectionbetween the module-connecting terminals and the interposer-connectingterminals flows.

Still another feature of the present invention may inhere in aninterface module included in an LSI package, the LSI package furtherincluding a signal processing LSI and an interposer mounting the signalprocessing LSI, the interface module having a transmission lineconfigured to establish an external interconnection of signal, which istransmitted through the interposer, the interface module comprising: aplurality of interposer-connecting terminals configured to mechanicallyand electrically connect with a plurality of module-connecting terminalsprovided on the interposer, part of the interposer-connecting terminalsare assigned as monitoring terminals, through which a monitoring currentto confirm electrical connection between the signal processing LSI andthe interface module flows.

Yet still another feature of the present invention may inhere in amonitoring circuit of an LSI package including a signal processing LSI,an interposer mounting the signal processing LSI and an interface modulehaving a transmission line configured to establish an externalinterconnection of signal, which is transmitted through the interposer,configured to monitor electrical connection between the signalprocessing LSI and the interface module, the monitoring circuitcomprising: a conduction confirmation circuit configured to confirm theelectrical connection by providing a first status signal when resistancein a current path from the signal processing LSI, through theinterposer, to the interface module is smaller than a predeterminedvalue, and a second status signal when the resistance is larger than thepredetermined value.

Yet still another feature of the present invention may inhere in amonitoring circuit of an LSI package including a signal processing LSI,an interposer mounting the signal processing LSI and an interface modulehaving a transmission line configured to establish externalinterconnection of a signal, which is transmitted through theinterposer, configured to confirm electrical connection between thesignal processing LSI and the interface module, the monitoring circuitcomprising: a conduction confirmation circuit configured to confirm theelectrical connection by providing a first status signal when amonitoring pulse provided by the signal processing LSI is returnedthrough a current path from the signal processing LSI, through theinterposer, to the interface module and a second status signal when themonitoring pulse is not returned from the current path.

Yet still another feature of the present invention may inhere in asignal processing LSI to be included in an LSI package, the LSI packagefurther including an interposer mounting the signal processing LSI, aninterface module having a transmission line configured to establish anexternal interconnection of signal, which is transmitted through theinterposer, and a monitoring circuit configured to monitor electricalconnection between the signal processing LSI and the interface module,the signal processing LSI comprising: a conduction confirmation circuitconfigured to confirm the electrical connection by providing a firststatus signal when the electrical connection in a current path from thesignal processing LSI, through the interposer, to the interface moduleis normal, and a second status signal when the electrical connection isabnormal.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic bird's-eye view illustrating a configuration of anLSI package provided with an I/F module according to a first embodimentof the present invention;

FIG. 2 shows an enlarged bird's-eye view of an interposer andconfiguration around the interposer;

FIG. 3 is an enlarged bird's-eye view showing an I/F module implementingthe LSI package of FIG. 1;

FIG. 4A is a partial schematic cross-sectional view of an I/F module,taken on a rectangular ringed plane along an array ofinterposer-connecting terminals which are arranged in a rectangulartopology around a rectangular window of FIG. 3;

FIG. 4B is a partial schematic cross-sectional view of an interposer,taken on a rectangular ringed plane along an array of module-connectingterminals which are arranged in a rectangular topology around a signalprocessing LSI of FIG. 2;

FIGS. 5A and 5B are schematic cross-sectional views showing theelectrical connections between an interposer and an I/F module in an LSIpackage provided with an I/F module, which was described in U.S. patentapplication Ser. No. 10/778,030, the entire contents of which areincorporated by reference herein;

FIG. 6 shows the enlarged bird's-eye view of an interposer and theconfiguration around the interposer according to a second embodiment ofthe present invention;

FIG. 7 is an enlarged bird's-eye view showing an I/F module according tothe second embodiment of the present invention;

FIG. 8A is a partial schematic cross-sectional view of an I/F module,taken on a rectangular ringed plane along an array ofinterposer-connecting terminals which are arranged in a rectangulartopology around a rectangular window of FIG. 7;

FIG. 8B is a partial schematic cross-sectional view of an interposer,taken on a rectangular ringed plane along an array of module-connectingterminals which are arranged in a rectangular topology around a signalprocessing LSI of FIG. 6;

FIG. 9A shows part of an enlarged bird's-eye view of an interposer of anLSI package provided with an I/F module of a third embodiment of thepresent invention;

FIG. 9B shows part of an enlarged bird's-eye view of an I/F module ofthe LSI package of the third embodiment of the present invention;

FIG. 10A shows part of an enlarged bird's-eye view of an interposer ofan LSI package provided with an I/F module according to a modificationof the third embodiment of the present invention;

FIG. 10B shows part of an enlarged bird's-eye view of an I/F module ofthe LSI package according to the modification of the third embodiment ofthe present invention;

FIG. 11 is a circuit diagram explaining a first conduction confirmationcircuit integrated in a signal processing LSI of an LSI package providedwith an I/F module of a fourth embodiment of the present invention;

FIG. 12 is a diagram explaining a second conduction confirmation circuitintegrated in a signal processing LSI of an LSI package provided with anI/F module according to a modification of the fourth embodiment of thepresent invention;

FIG. 13 is a diagram explaining a first I/O controller integrated in asignal processing LSI of an LSI package provided with an I/F module of afifth embodiment of the present invention; and

FIG. 14 is a diagram explaining a second I/O controller integrated in asignal processing LSI of an LSI package provided with an I/F moduleaccording to a modification of the fifth embodiment of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

Various embodiments of the present invention will be described withreference to the accompanying drawings. It is to be noted that the sameor similar reference numerals are applied to the same or similar partsand elements throughout the drawings, and the description of the same orsimilar parts and elements will be omitted or simplified. Generally andas it is conventional in the representation of semiconductor devices, itwill be appreciated that the various drawings are not drawn to scalefrom one figure to another nor inside a given figure, and in particularthat the layer thicknesses are arbitrarily drawn for facilitating thereading of the drawings.

Before explaining various embodiments of the present invention, an LSIpackage provided with an I/F module proposed by inventors of the presentinvention in U.S. patent application Ser. No. 10/778,030, filed Feb. 17,2004, the entire contents of which are incorporated by reference herein,will be explained by referring to FIG. 5A and FIG. 5B. U.S. patentapplication Ser. No. 10/778,030 shows an example using opticalinterconnections as external interconnections of a high-speed I/Fmodule. In FIG. 5A, reference numeral 1 is a signal processing LSI,reference numeral 2 is an interposer, reference numerals 3 c and 3 o areconnecting pads, reference numerals 10 a, 10 b, 10 c, . . . 10 r aresolder balls, reference numerals 18 a and 18 b are circuit boards,reference numerals 61 a and 61 b are driving/receiving ICs, referencenumerals 62 a and 62 b are electrical to optical (EO) or optical toelectrical (OE) converters, reference numeral 21 is a heat sink andreference numeral 22 is a cooling fan. The high-speed signals from/tothe signal processing LSI 1 are not supplied to/from the printed wiringboard through the solder balls 10 a, 10 b, 10 c, . . . 10 r, butsupplied to/from the driving/receiving ICs 61 a, 61 b through theconnecting pads 3 c, 3 o and the circuit boards 18 a, 18 b. Then, theelectrical signals are converted into optical signals or the opticalsignals are converted into electrical signals by the EO or OE converters62 a, 62 b and are given to the optical fiber bundles 64 a, 64 b. Here,“interposer” is an element in an IC package, which connects asemiconductor chip to a motherboard, etc. The interposer may beimplemented by lead frames, TAB tapes, resin substrates, etc.

FIG. 5B schematically shows the completed configuration of the LSIpackage provided with the I/F module of FIG. 5A. On the interposer 2mounting the signal processing LSI 1, the I/F module 4—which includes acombination of the circuit board 18 a, 18 b, the driving/receiving ICs61 a, 61 b, the EO or OE converters 62 a, 62 b, and the optical fiberbundles 64 a, 64 b—is mounted. And further, the heat sink 21 and thecooling fan 22 are attached on the upper part of the I/F module 4. Bythe configuration shown in FIG. 5B, heat radiation of the signalprocessing LSI 1 is established. The LSI package provided with the I/Fmodule having the above-mentioned configuration, can be assembled incompletely the same procedure and condition as those of standard LSIpackaging processes, which are carried out by existing packagingequipment (the reflow furnace, etc.), on the printed wiring boardsmanufactured by existing production lines. And only the process forfixing the I/F module to the interposer 2 from the top of the interposer2—for instance, by screw or adhesive—becomes the characteristic workprocess for assembling the LSI package provided with the I/F moduleshown in FIG. 5B. However, since the process for fixing the I/F moduleto the interposer 2 is by putting the I/F module on top of theinterposer 2, this does not need a high-precise position controllingtechnology (for instance, ±10 μm). That is, such position controllingaccuracy for a general electrical connector is enough for the processfor fixing the I/F module to the interposer 2, and the cost of theassembling process of the LSI package provided with the I/F module shownin FIG. 5B does not increase so much. Namely, even with the existingpackaging method using existing low cost printed wiring boards (forinstance, glass epoxy board, etc.), a high-speed interconnection—forinstance, 20 Gbps, which generally can not be realized in usual boardelectrical interconnection—becomes possible.

In the process sequence for mass-producing such LSI packages, someproducts are often accompanied by failures. Concretely, a malfunction ofthe wiring board is caused by poor contact (poor connection) of electricjoints between the I/F module and the interposer. Main causes of theabove failure mode are ascribable to, for instance, poor mounting of theI/F module on the interposer such as incomplete insertion of the I/Fmodule, etc. and contamination of dirt to the electric joint, etc.Although these failure-causes seldom happen and are relatively simple,and are usually possible to recover by re-mounting the I/F module on theinterposer and by air gun blowing of the electric joint, it is desirablethat poor contact (poor connection) of the electric joint should bedetected immediately so as to quickly find out appropriate measures tocounter these failure-causes, from the viewpoint of product reliabilityand quality control.

Therefore, following embodiments of the present invention propose an LSIpackage provided with an I/F module (hereinafter called “an LSIpackage”), which can solve the above-mentioned problem, adding anelectric contact monitoring mechanism to the LSI package, the monitoringmechanism configured to monitor electric contact (electrical connection)between a signal processing LSI and an I/F module. The embodiments ofthe present invention also propose a monitoring circuit configured tomonitor an electric contact between the signal processing LSI and theinterface module, equivalently confirming the electric contact betweenthe signal processing LSI and the interface module. The embodiments ofthe present invention further propose an input/output (I/O) controllerconfigured to control transmission and reception of signals to and fromthe interface module, by blocking the signals when poor contact (poorconnection) is detected in the current path provided in the LSI package.

Next, first to fifth embodiments of the present invention will bedescribed with reference to the accompanying drawings. It is to be notedthat the same or similar reference numerals are applied to the same orsimilar parts and elements throughout the drawings, and the descriptionof the same or similar parts and elements will be omitted or simplified.Generally and as it is conventional in the representation ofsemiconductor packages, it will be appreciated that the various drawingsare not drawn to scale from one figure to another nor inside a givenfigure, and in particular that the layer thicknesses are arbitrarilydrawn for facilitating the reading of the drawings.

In the following description, specific details are set forth, such asspecific materials, the process and equipment in order to provide athorough understanding of the present invention. It will be apparent,however, to one skilled in the art that the present invention may bepracticed without these specific details. In other instances, well-knownmanufacturing materials, process and equipment are not set forth indetail in order not to unnecessary obscure the present invention. Forinstance, though in the description of the first to fifth embodiments,the example using an optical interconnection is shown as an externalinterconnection of the high-speed I/F module, an electricalinterconnection such as a small coaxial cable array may be acceptablefor the external interconnection. In the case where an externalinterconnection is an electrical interconnection, high-speed wiringinterface IC such as a line driver IC and a line receiver IC can bemounted instead of the driving/receiving ICs and the optical devices,and if necessary, a pre-emphasis circuit and an equalizer, etc. may becontained. Prepositions, such as “on”, “over” and “under” are definedwith respect to a planar surface of the interposer, regardless of theorientation in which the interposer is actually held. A layer is onanother layer even if there are intervening layers.

First Embodiment

As shown in FIG. 1, an LSI package according to a first embodiment ofthe present invention includes an interposer 2, a signal processing LSI1, which is mounted on the interposer 2 and an I/F module 4, which iselectrically connected with an interposer 2. The interposer 2 isemployed to facilitate electrical connection between the signalprocessing LSI 1 and the printed wiring board 8 such that the interposer2 can be connected to the printed wiring board 8 by electric joints.When the signal processing LSI 1 is taken as the zero-th packaginghierarchy level, “a first level package” is implemented by the signalprocessing LSI 1 and the interposer. And by mounting the I/F module 4 on“the first level package”, the LSI package as “a second level package”is completed. In addition, “a third level package” is implemented by acombination of “the second level package” and the printed wiring board8. The solder balls are shown in FIG. 2 as “board-connecting joints 10a, 10 b, . . . 10 r” for electrically connecting the interposer 2 withthe printed wiring board. Though, as the interposer 2 according to thefirst embodiment, a ball grid array (BGA) package is illustrated, it canbe acceptable to use a pin grid array (PGA) package and a land gridarray (LGA) package, etc. instead of the BGA package. In addition, sincethe interposer 2 is one of the packaging elements configured to connecta semiconductor chip (the signal processing LSI) 1 to the motherboard(printed wiring board) 8 in the configuration of an IC package, a leadframe, a tape automated bonding (TAB) tape, or a resin substrate, etc.can be used as the interposer 2. Therefore, various organic basedmaterials such as synthetic resin and inorganic based materials such asceramic, glass, etc. can be acceptable for the substrate material of theinterposer 2. Organic based materials may include phenol resin,polyester resin, epoxy resin, polyimide resin, fluorocarbon polymers,etc. Papers, woven glass fibers, or glass base materials, etc. areusable for a reinforcement base material serving as a core in alaminated slab configuration. A representative inorganic material forthe substrate material is ceramic. Metallic substrates are used for thepurpose of improving thermal dissipation characteristics of theinterposer 2. And glass is used when a transparent substrate isnecessary for the interposer 2. Alumina (Al₂O₃), mullite (3Al₂O₃.2SiO₂),beryllia (BeO), aluminum nitride (AlN), silicon carbide (SiC), etc. areusable as ceramic substrates of the interposer 2. In addition,metal-based substrates (metal insulated substrates) having a multi-levelstructure, laminating heat-resistant resin films of the polyimide basedmaterial on metals such as iron and copper, may well be used for theinterposer 2.

A plurality of module-connecting terminals (micro sockets) 3 a-3 x and11 a-11 d are established in the interposer 2 to facilitate connectionagainst the I/F module 4. And, corresponding to the arrangement of themodule-connecting terminals (micro sockets) 3 a-3 x and 11 a-11 d, thearrangement of interposer-connecting terminals (micro pins) 5 a-5 x and12 a-12 d are established in the I/F module 4. In the LSI packageaccording to the first embodiment of the present invention, part of themodule-connecting terminals (micro sockets) 3 a-3 x and 11 a-11 d andthe interposer-connecting terminals (micro pins) 5 a-5 x and 12 a-12 dare assigned respectively as monitoring terminals configured toequivalently confirm the electric contact condition (electricalconnection condition) between the signal processing LSI 1 and the I/Fmodule 4. That is to say, an array of the module-connecting terminals 3a-3 x and 11 a-11 d disposed in the interposer 2 are classified into twoparts including interposer-site electric joints (first electric joints)3 a-3 x and interposer-site monitoring terminals (first monitoringterminals) 11 a, 11 b, 11 c, and 11 d, while an array of theinterposer-connecting terminals 5 a-5 x and 12 a-12 d placed in the I/Fmodule 4 are classified into two parts including the module-siteelectric joints (second electric joints) 5 a-5 x and module-sitemonitoring terminals (second monitoring terminals) 12 a, 12 b, 12 c and12 d.

The I/F module 4 has four aligned bundles of transmission lines 6 a, 6b, 6 c, and 6 d for establishing external interconnection of signals(high-speed signals) which are transmitted through the interposer-siteelectric joints 3 a-3 x and the module-site electric joints 5 a-5 x. InFIG. 1, parallel fiber-ribbon cables implemented by a plurality ofoptical fibers are illustrated as the aligned bundle of transmissionlines 6 a, 6 b, 6 c and 6 d. At the end of the aligned bundle oftransmission lines (parallel fiber-ribbon cable) 6 a, an opticalconnector 7 for connecting with an external aligned bundle oftransmission lines (parallel fiber-ribbon cable), is shown. The otheraligned bundles of transmission lines 6 b, 6 c and 6 d are alsoconnectable to external aligned bundles of transmission lines by thesimilar optical connectors. The aligned bundles of transmission lines 6a, 6 b, 6 c and 6 d can be made by not only optical fibers but alsooptical waveguide films implemented by UV hardened epoxy resin,polyimide resin, or fluorocarbon polyimide resin, etc. In the opticalwaveguide films, a linear array of cores, each having a ridge structurewith a cross-sectional dimension of around 50 μm^(□) for a multi-modeoptical waveguide film 32, and around 9 μm^(□) for a single mode opticalwaveguide film 32, may be arranged in the inside of the opticalwaveguide film. In FIG. 1, though the structure where four alignedbundles of transmission lines 6 a, 6 b, 6 c and 6 d are extending alongfour directions of the I/F module 4 has been shown, a structure wherethree aligned bundles of transmission lines are taken out along threedirections or less is also possible. And if the I/F module 4 is apolygonal shape over a pentagon, a structure in which a plurality ofaligned bundles of transmission lines are taken out along a plurality ofdirections over five directions is also possible. Still, similar to theinterposer 2, various materials of organic based materials includingsynthetic resin and inorganic based materials such as ceramic, glass areusable as a material of the I/F module 4.

Board wiring groups 9 a and 9 b are delineated on the printed wiringboard 8, being connected to the board-connecting joints (solder balls)10 a, 10 b, 10 c, . . . 10 r, which are adapted for facilitateelectrical connection between the printed wiring board 8 and theinterposer 2. The board wiring groups 9 a and 9 b may include powerlines, control lines, etc. On the printed wiring board 8, a plurality ofcircuit components X_(ij) (i=1-4; j=1-3) are mounted. FIG. 1 typicallyillustrates as if twelve identical chip capacitors are arranged, butcircuit components X_(ij) (i=1-4; j=1-3) can include various kinds ofpassive elements such as resistors and inductors, etc. And, as thecircuit components X_(ij), semiconductor active elements such astransistors, thyristors, diodes can be acceptable for use, and LSIchips, etc. may be included in the circuit components X_(ij). Inaddition, the number of circuit components X_(ij) is not limited totwelve, and the layout of the circuit components X_(ij) may be randomlyarranged.

With a hybrid integrated circuit implemented by the circuit componentsX_(ij), a monitoring circuit configured to equivalently monitor electriccontact (electrical connection) between the signal processing LSI 1 andthe interface module 4 in the LSI package according to the firstembodiment can be implemented on the printed wiring board 8.Furthermore, power supply circuits configured to supply voltages and/orcurrents to the monitoring circuit can be implemented on the printedwiring board 8 by the circuit components X_(ij), accomplishing a hybridintegrated circuit. And, a display unit configured to display anabnormal connection when the abnormality was discovered in the electriccontact, may be additively mounted on the printed wiring board 8. As thedisplay unit, such a circuit, for instance, configured to turn on a redlight emitting diode (LED) when a poor electric contact is detected andto turn on a green LED when a normal electric contact is detected, maybe used. Therefore, LEDs, etc. can be also included in the circuitcomponents X_(ij) which are mounted on the printed wiring board 8 shownin FIG. 1.

FIG. 2 shows the enlarged bird's-eye view of the interposer 2 and theconfiguration around the interposer 2. The interposer is connected toboard wirings 14 l 14 m, which implement the wiring group 9 a, and boardwirings 14 n . . . 14 r, which implement the wiring group 9 b, on theprinted wiring board 8 by the board-connecting joints (solder balls) 10a, 10 b, . . . 10 r for connecting the printed wiring board to theinterposer 2. In addition, monitor wirings 13 a, 13 c and ground wiring13 b, 13 d etc. disposed on the printed wiring board 8 are also shown.And FIG. 2 perspectively shows a configuration in which theinterposer-site electric joints 3 a-3 x (micro sockets) are arranged sothat the array of interposer-site electric joints 3 a-3 x surround thesignal processing LSI 1 around the peripheral region of the interposer2, on which the signal processing LSI 1 is mounted. FIG. 2 also shows aconfiguration in which four interposer-site monitoring terminals (microsockets) 11 a, 11 b, 11 c and 11 d are assigned at two corners of arectangular arrangement of the interposer-site electric joints 3 a-3 x.The topology shown in FIG. 2 corresponds to a structure in which a partof the ringed arrangement of the interposer-site electric joints 3 a-3 xis utilized (replaced) by the interposer-site monitoring terminals 11 a,11 b, 11 c and 11 d.

FIG. 3 is an enlarged bird's-eye view showing the I/F module 4 ofFIG. 1. At the center of the I/F module 4, a rectangular window havingthe size in which the rectangular signal processing LSI 1 can beaccommodated, when the I/F module 4 is mounted on the interposer 2, hasbeen established. In the I/F module 4 shown in FIG. 3, an array of themodule-site electric joints (micro pins) 5 a-5 x corresponding to thearray of interposer-site electric joints (micro sockets) 3 a-3 x areestablished as a rectangular arrangement around the rectangular window.Then, the interposer 2 and the I/F module 4 are electrically connectedthrough mechanical contact of the interposer-site electric joints 3 a-3x with the corresponding module-site electric joints 5 a-5 x. Further,the module-site monitoring terminals (micro pins) 12 a, 12 b, 12 c and12 d which correspond to the interposer-site monitoring terminals (microsockets) 11 a, 11 b, 11 c and 11 d shown in FIG. 2, are established atthe corners of the rectangular arrangement of the module-site electricjoints (micro pins) 5 a-5 x. At the right side corner of the I/F module4 shown in FIG. 3, a conductive path (short-circuit path) 15 a, whichelectrically connects between the first module-site monitoring terminal12 a and the second module-site monitoring terminal 12 b at lowimpedance, is shown. And a conductive path (short-circuit path) 15 bwhich electrically connects between the third module-site monitoringterminal 12 c and the fourth module-site monitoring terminal 12 d isshown at the left side corner of the I/F module 4 shown in FIG. 3. Thetopology shown in FIG. 3 corresponds to a structure in which a part ofthe ringed arrangement of the module-site electric joints 5 a-5 x isutilized (replaced) by the module-site monitoring terminals 12 a, 12 b,12 c and 12 d.

In the LSI package according to the first embodiment of the presentinvention, to perform operation of the monitoring circuit, it is enoughfor the LSI package to encompass at least one pair of themodule-connecting terminals (micro sockets) mutually and electricallyshort-circuited among the module-connecting terminals (micro sockets) 3a-3 x; 11 a-11 d on the interposer 2, or at least one pair of theinterposer-connecting terminals (micro pins) mutually and electricallyshort-circuited among interposer-connecting terminals (micro pins) 5 a-5x; 12 a-12 d on the I/F module 4. The pair of monitoring terminals iselectrically connected as part of the monitoring circuit forequivalently confirming the electric contact condition between thesignal processing LSI 1 and the I/F module 4. Therefore, FIG. 3 showsthat a port between the first module-site monitoring terminal 12 a andthe second module-site monitoring terminal 12 b on the I/F module 4 areelectrically short-circuited by the conductive path (short-circuit path)15 a, and a port between the third module-site monitoring terminal 12 cand the fourth module-site monitoring terminal 12 d of the I/F module 4are electrically short-circuited by the conductive path (short-circuitpath) 15 b. Also, at least one pair of the mutually and electricallyshort-circuited interposer-site monitoring terminals can be provided onthe side of the interposer 2 for performing operation of the monitoringcircuit in the LSI package according to the first embodiment of thepresent invention.

Each of the interposer-site monitoring terminals (micro socket) 11 a, 11b, 11 c and 11 d shown in FIG. 2 and each of the correspondingmodule-site monitoring terminals (micro pins) 12 a, 12 b, 12 c and 12 dshown in FIG. 3 serve as contact monitors for equivalently confirmingthe electrical connection by mechanical contact of each of theinterposer-site electric joints (micro sockets) 3 a-3 x with thecorresponding module-site electric joints 5 a-5 x. The interposer-siteelectric joints (micro sockets) 3 a-3 x, the module-site electric joints5 a-5 x, the interposer-site monitoring terminals (micro socket) 11 a,11 b, 11 c, 11 d and the module-site monitoring terminals (micro pins)12 a, 12 b, 12 c, 12 d can be made of metallic plates including aluminum(Al), copper (Cu), copper alloys such as Cu—Fe, Cu—Cr, Cu—Ni—Si, Cu—Sn,etc., ferronickel-alloys such as Ni—Fe, Fe—Ni—Co and composite materialof copper and stainless steel, etc. In addition, these electric jointsand monitoring terminals may be provided with nickel (Ni) plating and/orgold (Au) plating, etc. on these metallic materials. Concretely, anarrangement of a 1.27 mm pitch of brass pins coated with Ni plating,each pin having a 1 mm length at 0.5 mm^(φ) diameter, are acceptable forthe micro pins which implement the module-site electric joints 5 a-5 xand the module-site monitoring terminals 12 a, 12 b, 12 c and 12 d. And,the micro sockets used as the interposer-site electric joints 3 a-3 xand the interposer-site monitoring terminals 11 a, 11 b, 11 c and 11 dcan adopt an arrangement of a 1.27 mm pitch of brass pipes coated withNi plating, each of the pipes having a 1.5 mm depth at a 0.8 mm^(φ)socket hole diameter, by cutting part of the brass pipe and pushing thecut part into the inner portion of the pipe so as to form a cantileverspring (the micro pin holding mechanism).

In the same configuration as FIGS. 5A and 5B, which discloses part ofthe invention stated in U.S. patent application Ser. No. 10/778,030, inthe LSI package according to the first embodiment of the presentinvention, the optical fiber bundle 6 d (aligned bundle of transmissionlines) is inserted from the outside on the left of the I/F module 4towards the inside of the I/F module 4, and the optical fiber bundle 6 b(aligned bundle of transmission lines) is inserted from the outside onthe right of the I/F module 4 towards the inside of the I/F module 4.Each core of the optical fiber in the optical fiber bundle 6d (alignedbundle of transmission lines) on the left side is precisely aligned andoptically coupled with each of the active regions of the EO or OEconverter array 62 b (see FIGS. 5A and 5B) disposed in the left side ofthe inside of the I/F module 4. Similarly, each core of the opticalfiber in the optical fiber bundle 6 b (aligned bundle of transmissionlines) on the right side is precisely aligned and optically coupled witheach of the active regions of the EO or OE converter array 62 a (seeFIGS. 5A and 5B) disposed in the right side of the inside of the I/Fmodule 4. Also, each core of the optical fiber in other optical fiberbundles 6 a and 6 c (aligned bundles of transmission lines) areprecisely aligned and optically coupled with each of the active regionsof the EO or OE converters (see FIGS. 5A and 5B) disposed in the rightside of the inside of the I/F module 4.

As well as the configuration shown in FIGS. 5A and 5B, the EO or OEconverter arrays 62 a and 62 b are connected to the driving/receivingICs 61 a and 61 b by metallic wirings in the inside of the I/F module 4,and the driving/receiving ICs 61 a and 61 b are connected by metallicwirings to each of the module-site electric joints 5 a 5 b, 5 d, . . . 5n, 5 p, 5 q, . . . 5 x. The EO or OE converter arrays 62 a and 62 b,each having the structure in which a plurality of semiconductor lasersand photo-detectors, etc. are integrated in a semiconductor chip, areinstalled in the inside of the I/F module 4 so that the EO or OEconverter arrays 62 a and 62 b can optically couple with each core ofthe optical fiber in the optical fiber bundles (aligned bundles oftransmission lines) 6 a, 6 b, 6 c, and 6 d in the similar architectureshown in FIGS. 5A and 5B. Although illustration such as the detailedsurface wirings is omitted, patterns of electrode wirings are drawn fromthe EO or OE converter arrays 62 a and 62 b, so as to facilitateelectrical connection between the EO or OE converter arrays 62 a and 62b and the driving/receiving ICs 61 a and 61 b. Otherwise, thedriving/receiving ICs 61 a and 61 b can be built-in or integratedmonolithically in the same chip of the EO or OE converter arrays 62 aand 62 b.

On the surface of the signal processing LSI 1, a plurality of signalinput/output (I/O) terminals (bonding pads) are arranged, although theillustration was omitted. Similarly on the surface of the interposer 2,a plurality of lands are arranged. Then, each of these lands is mutuallyconnected to the corresponding signal I/O terminals (bonding pads)arranged on the surface of the signal processing LSI 1 by solder bumpsetc. In addition, the solder bump joints may be encapsulated byunderfill resin. The underfill resin may be made of anisotropicconductive materials in which gold (Au), silver (Ag), nickel (Ni) ormetallic powders such as titanium-nickel alloy (Ti—Ni) etc. aredispersed in insulating resins such as uretan resin and epoxy resin etc.

Though the illustration was omitted, the interposer 2 establishes amulti-level structure and inside of the multi-level structure of theinterposer 2, buried interconnects serving as high-speed signaltransmission lines are formed. Power supplies, ground lines and controlsignal lines at low-speed are also selectively delineated in themulti-level structure of the interposer 2 as buried interconnects. Oneend of each of the buried interconnects is connected to the landsarranged on the surface of the interposer 2 through via-plugs etc.penetrating the corresponding insulating layers in the multi-levelstructure of the interposer 2. The other end of each of the buriedinterconnects is connected to each of the interposer-site electricjoints 3 a, 3 b, 3 d, . . . 3 n, 3 p, 3 q, . . . 3 x. In this manner,each of the interposer-site electric joints 3 a, 3 b, 3 d, . . . 3 n, 3p, 3 q, . . . 3 x is electrically connected to each of the correspondingmodule-site electric joints 5 a, 5 b, 5 d, . . . 5 n, 5 p, 5 q, . . . 5x by mechanical contact. In addition, the interposer-site monitoringterminals 11 a, 11 b, 11 c, and 11 d shown in FIG. 2 are alsoelectrically connected to the module-site monitoring terminals 12 a, 12b, 12 c and 12 d shown in FIG. 3, thereby establishing mechanicalcontact mutually.

Similar to the cross-sectional view of FIGS. 5A and 5B, the high-speedsignals from the signal processing LSI 1 are not supplied to the printedwiring board 8 through the board-connecting joints (solder balls) 10 a,10 b, . . . 10 r but are supplied to the driving/receiving ICs 61 a and61 b through the interposer-site electric joints 3 a-3 x and thecorresponding module-site electric joints 5 a-5 x in the LSI package ofthe first embodiment. And the electric signals are converted to theoptical signals by the EO or OE converter arrays 62 a and 62 b and aregiven to parallel fiber-ribbon cables implemented by bundles of opticalfibers (aligned bundles of transmission lines) 6 a, 6 b, 6 c and 6 d.According to the LSI package of the first embodiment of the presentinvention, by the same configuration shown in FIGS. 5A and 5B, thoughnot illustrated in FIG. 1, it is possible to establish heat radiation ofthe signal processing LSI 1 when the heat sink 21 and the cooling fan 22are attached on to the upper part of the I/F module 4.

The LSI package according to the first embodiment of the presentinvention shown in FIGS. 1 to 3 can be assembled in completely the sameprocedure and condition as those of the LSI packaging, which is carriedout by existing packaging equipments (reflow furnace, etc.), on theprinted wiring boards manufactured by existing production lines. Onlythe process for fixing the I/F module to the interposer 2 from the topof the interposer 2—for instance, by screw or adhesive—becomes thepeculiar work for assembling the LSI package according to the firstembodiment. Since the process for fixing the I/F module to theinterposer 2 is by putting the I/F module on top of the interposer 2, itdoesn't need a high-precise position controlling technology (forinstance, ±10 μm). That is, such position controlling accuracy for ageneral electrical connector is enough for the process for fixing theI/F module to the interposer 2. So, the cost of the assembling processof the LSI package does not increase very much. Namely, even with theexisting packaging method using existing low cost printed wiring boards(for instance, glass epoxy board, etc.), a high-speed board possessinghigh-speed interconnections becomes possible—for instance, 20 Gbps—whichgenerally can not be realized in an usual board electricalinterconnection.

The configuration and function of the interposer-site monitoringterminals 11 a, 11 b, 11 c, 11 d and the module-site monitoringterminals 12 a, 12 b, 12 c, 12 d, which are shown in FIGS. 1 to 3, willbe explained with reference to FIGS. 4A and 4B. FIG. 4A is a schematiccross-sectional view of the I/F module 4, taken on a ringed planeperpendicular to the surface of the I/F module 4, the ringed planerunning along the ringed array of the module-site electric joints 5 a-5x, which are arranged in a rectangular topology around the rectangularwindow, and the module-site monitoring terminals 12 a, 12 b, 12 c and 12d, which are assigned at two corners of a rectangular arrangement of theelectric joints 5 a-5 x. Similarly, FIG. 4B is a schematiccross-sectional view of the interposer 2, taken on a ringed plane alongthe array of interposer-site electric joints 3 a-3 x which are arrangedin a rectangular topology around the signal processing LSI 1 and theinterposer-site monitoring terminals 11 a, 11 b, 11 c and 11 d which areassigned at two corners of a rectangular arrangement of the electricjoints 3 a-3 x.

As shown in FIG. 4A, a port between the module-site monitoring terminal12 a and the module-site monitoring terminal 12 b is electricallyshort-circuited by a conductive path (short-circuit path) 15 a shown inFIG. 3 which is implemented by short-circuit via-plugs 151 a, 151 b anda buried interconnect 152 a. Similarly, a port between the module-sitemonitoring terminal 12 c and the module-site monitoring terminal 12 d iselectrically short-circuited by a conductive path (short-circuit path)15 b shown in FIG. 3 which is implemented by short-circuit via-plugs 151c, 151 d and a buried interconnect 152 b. On the other hand, theinterposer-site monitoring terminal 11 a on the left side of FIG. 4B isconnected to the monitor wiring 13 a through a monitoring via-plug 131 aand a monitoring land 132 a. The interposer-site monitoring terminal 11b is connected to a ground wiring 13 b through a grounding via-plug 131b and a grounding land 132 b. In addition, the interposer-sitemonitoring terminal 11 c on the right side of FIG. 4B is connected tothe monitor wiring 13 c through a monitoring via-plug 131 c and amonitoring land 132 c. And the interposer-site monitoring terminal 11 dis connected to a ground wiring 13 d through a grounding via-plug 131 dand a grounding land 132 d.

In the configuration of FIGS. 4A and 4B, by connecting a voltage supplyor a current supply to the monitor wiring 13 a on the left side of FIG.4B and by equivalently confirming the electric contact condition betweenthe signal processing LSI 1 and the I/F module 4, the monitoring circuitcan be established by a route from the monitor wiring 13 a to the ground(GND) wiring 13 b through the interposer-site monitoring terminal 11 a,the module-site monitoring terminal 12 a, the conductive path(short-circuit path) 15 a, the module-site monitoring terminal 12 b andthe interposer-site monitoring terminal 11 b. Namely, current issupplied to the monitoring circuit in the above-mentioned configurationwhere one pair of the interposer-site monitoring terminal 11 a and themodule-site monitoring terminal 12 a are electrically connected and theother pair of the module-site monitoring terminal 12 b and theinterposer-site monitoring terminal 11 b are also electricallyconnected. And through monitoring the above-mentioned current condition,it becomes possible to equivalently confirm (monitor) the electricconnection between the interposer-site electric joints 3 a-3 x and themodule-site electric joints 5 a-5 x and to monitor the electric contactcondition.

In this manner, in the LSI package according to the first embodiment ofthe present invention, it is possible to confirm (monitor) the electriccontact condition between the interposer-site electric joints 3 a-3 xand the module-site electric joints 5 a-5 x.

In the LSI package according to the first embodiment of the presentinvention, the length of the micro pins which implement the module-siteelectric joints 5 a-5 x is 1 mm. Therefore, for instance, in the casewhere the size of the interposer 2 is 40 mm×40 mm, poor contact (poorconnection) is not generated if the angle of the mounting inclinationbetween the I/F module 4 against the interposer 2 is larger than 1degree. However, the situation where the electrical contact is not wellachieved over the whole site may arise, when the inclination between theinterposer 2 and the I/F module 4 occurs because of contamination ofdirt to the electric joints, etc.

In the above-mentioned case, it is advantageous to establish electriccontact monitoring terminals in not only one location but in over twolocations. Namely, in the configuration of FIGS. 4A and 4B, byconnecting a voltage supply or a current supply, etc. to the monitorwiring 13 c on the opposite side (right side) of the interposer-sitemonitoring terminals 11 a and 11 b on the left of FIG. 4B and byequivalently confirming the electric contact condition between theinterposer 2 and the I/F module 4, the monitoring circuit can beestablished by a route from the monitor wiring 13 c to the ground (GND)wiring 13 d through the interposer-site monitoring terminal 11 c, themodule-site monitoring terminal 12 c, the conductive path (short-circuitpath) 15 b, the module-site monitoring terminal 12 d and theinterposer-site monitoring terminal lid. Namely, current can be suppliedto the monitoring circuit on the right side of FIGS. 4 A and 4B in thecondition where one pair of the interposer-site monitoring terminal 11 cand the module-site monitoring terminal 12 c on the right side of FIGS.4A and 4B are electrically connected and the other pair of themodule-site monitoring terminal 12 c and the interposer-site monitoringterminal 11 d on the right side of FIGS. 4A and 4B are also electricallyconnected. And through monitoring of the electric contact in themonitoring circuit on the right side, simultaneously along withmonitoring of the electric contact in the monitoring circuit on the leftside, monitoring of the electrical contact condition between theinterposer-site electric joints 3 a-3 x and the module-site electricjoints 5 a-5 x can be surely realized.

In this manner, if currents can be supplied to the above-mentionedmonitoring circuits disposed at both sides of a configuration shown inFIGS. 4A and 4B, poor contact seldom occurs in the electric connectingjoints between the monitoring circuits of both side of FIGS. 4A and 4B.If a poor contact occurs in the electric connecting joints disposedbetween the monitoring circuits at both ends, though current is suppliedto the monitoring circuits at both ends, such poor contact is mostlycaused by a malfunction of the interposer 2 and/or the I/F module 4itself (including the electric joints), and the main cause of poorcontact is ascribable to a separate problem which is different fromfunctional problems such as the monitoring circuits are not working. Inthe LSI package according to the first embodiment, though the monitoringcircuit on the left side can monitor the electric contact conditionindependently from the monitoring circuit on the opposite side (rightside), it is possible to monitor a whole united circuit at one time byconfirming the electric conduction between the monitor wiring 13 a onthe left side and the monitor wiring 13 c on the opposite side (rightside), because the ground wirings 13 b and 13 d are connected mutuallyby GND. This united electric contact monitoring system can serve tosimplify the monitoring mechanism by confirming the whole electriccontact condition by a single united monitor circuit. And on thecontrary, when poor contact is detected, it is possible to analyze whichcircuit caused the poor contact by separately examining the monitoringcircuits on both sides. These different modes of operation can beselected by choosing two electrode wirings from a combination of threeelectrode wirings of the monitor wiring 13 a on the left side, themonitor wiring 13 c on the right side and GND.

In the case of the LSI package according to the first embodiment shownin FIG. 1 to FIG. 4B, each of the monitoring circuits is assigned at twocorners of a rectangular arrangement of the electric joints, theassignment of configuration and topology of the monitoring circuits isnot limited to those shown in FIG. 1 to FIG. 4B. For instance, themonitoring circuits can be assigned at all four corners of therectangular arrangement of the electric joints, and poor mountingbetween the I/F module 4 and the interposer 2 can be prevented throughassigning monitoring circuits at four points which are locatedrespectively in the middle of the four sides of the rectangulararrangement of the electric joints.

As in the case of FIGS. 5A and 5B, mounting of the I/F module 4 on theinterposer 2 can be done by fixing the I/F module 4 along with the heatsink 21 attached on to the upper part of the I/F module 4 by screw oradhesive. However, poor contact of the electric joints may occur by achange with the passage of time, or aging effects. However, the LSIpackage according to the first embodiment of the present invention hasthe advantage that the system maintenance is also simplified sincewhether poor contact of the electric joints has occurred or not can beconfirmed easily.

As mentioned above, the LSI package according to the first embodiment ofthe present invention, whether poor contact of the electric jointsbetween the I/F module 4 and the interposer 2 has occurred and whether amalfunction of the wiring board is caused by poor contact of theelectric joints between the I/F module 4 and the interposer 2 can beeasily diagnosed. In other words, according to the LSI package of thefirst embodiment, it is possible to analyze failure causes includingpoor mounting of the I/F module 4 on the interposer 2 such as incompleteinsertion of the I/F module 4 and contamination of dirt to the electricjoints quickly and surely with ease. These failure causes are easilyrecovered by re-mounting the I/F module 4 and by air gun blowing of theelectric joints, which achieves an improvement of product reliability.And from the viewpoint of quality control, poor contact of the electricjoints can be detected immediately so as to counter the above-mentionedfailure-causes.

According to the LSI package of the first embodiment, it is possible toconduct a reflow-process, after removing the I/F module 4 from theinterposer 2, in a usual manufacturing line. In addition, by makingelectrical connection between the interposer 2 and the I/F module 4through mechanical contact, position controlling accuracy with extremelyhigh precision is not required, which establishes a comparatively simpleholding mechanism.

As mentioned above, since it becomes possible to monitor the electriccontact condition between the interposer 2 and the I/F module 4 easilyaccording to the LSI package of the first embodiment, investment in anew manufacturing line in which the reflow-process is designed so thatit is only possible under specific condition becomes unnecessary. Inaddition, because a highly precise position controlling technology, apressure mechanism and a holding mechanism, etc. are unnecessary for theconfiguration of electrical connectors, cost reduction can be achieved.And further, because such equipment for monitoring poor assembly inelectric joints and alarming the degradation of performances associatedwith the passage of time can be attached, an LSI package with low-costand high-reliability can be obtained. Therefore, according to the LSIpackage of the first embodiment, interconnection between high-speedchips of the signal processing LSI 1 can be realized at a low cost, andit becomes possible to promote the upgrading of informationcommunication equipment, etc.

Second Embodiment

In the LSI package according to the first embodiment of the presentinvention, the module-site electric joints (second electric joints) 5a-5 x and the module-site monitoring terminals (second monitoringterminals) 12 a, 12 b, 12 c and 12 d are implemented by micro pins, andthe interposer-site electric joints (first electric joints) 3 a-3 x andthe interposer-site monitoring terminals (first monitoring terminals) 11a, 11 b, 11 c and 11 d are implemented by micro sockets, as shown inFIG. 6 and FIG. 7, joints having a more simpler configuration such aswhere opposing upper and lower metallic film patterns (lands) join witheach other may well be adopted as the electric joints and the monitoringterminals of the monitoring circuit in a second embodiment.

FIG. 6 shows the enlarged birds-eye view of an interposer 2 and theconfiguration around the interposer 2 according to the second embodimentof the present invention. The interposer 2 is connected to board wirings14 l, 14 m, 14 n, . . . 14 r on a printed wiring board (the illustrationis omitted) by the board-connecting joints (solder balls) 10 a, 10 b, .. . 10 r to the interposer 2. In FIG. 6, although the illustration ofthe printed wiring board is omitted, the board wirings 14 n, 14 o . . .14 r delineated on the printed wiring board, implementing the boardwiring group 9 a, and the board wirings 14 m, 14 l delineated on theprinted wiring board, implementing the board wiring group 9 b, areshown. In addition, the monitor wirings 13 a, 13 c and the groundwirings 13 b, 13 d etc. disposed on the printed wiring board are alsoshown.

On the interposer 2 according to the second embodiment, themodule-connecting terminals (3 a-3 x; 11 a-11 d) are implemented bysimple rectangular patterns of metallic films (lands). And correspondingto the module-connecting terminals (3 a-3 x; 11 a-11 d), theinterposer-connecting terminals (5 a-5 x; 12 a-12 d) are alsoimplemented by simple rectangular patterns of metallic films (lands). Inthe LSI package according to the second embodiment of the presentinvention, part of the module-connecting terminals (3 a-3 x; 11 a-11 d)and the interposer-connecting terminals (5 a-5 x; 12 a-12 d), which areimplemented by simple metallic film patterns (lands), are used asmonitoring circuits configured to equivalently confirm the electriccontact condition between the signal processing LSI 1 and the I/Fmodule. That is to say, an array of the module-connecting terminals 3a-3 x and 11 a-11 d, which are disposed on the interposer 2, areclassified into two parts including the interposer-site electric joints3 a-3 x and the interposer-site monitoring terminals 11 a, 11 b, 11 c,and 11 d, while an array of the interposer-connecting terminals 5 a-5 xand 12 a-12 d, which are disposed on the I/F module 4, are classifiedinto two parts including the module-site electric joints 5 a-5 x and themodule-site monitoring terminals 12 a, 12 b, 12 c and 12 d.

In defining and classifying the metallic film patterns (lands) asmentioned above, FIG. 6 shows a perspective configuration in which theinterposer-site electric joints (lands) 3 a-3 x of around 100 μm²-0.8mm² are arranged so that the array of interposer-site electric joints 3a-3 x surround the signal processing LSI 1 around the peripheral regionof the interposer 2, on which the signal processing LSI 1 is mounted.FIG. 6 also shows a configuration in which four interposer-sitemonitoring terminals (lands) 11 a, 11 b, 11 c and 11 d are assigned attwo corners of a rectangular arrangement of the interposer-site electricjoints 3 a-3 x. In addition to the rectangular pattern around 100μm²-0.8 mm², a metallic film electrode of a circular geometry around 8mm^(φ) may be used for the connecting terminals. The interposer-siteelectric joints 3 a-3 x and the interposer-site monitoring terminals 11a, 11 b, 11 c and 11 d may be formed simultaneously as surfaceelectrodes when interposer-site surface wirings are delineated on theinterposer 2.

FIG. 7 is an enlarged bird's-eye view showing the I/F module 4 accordingto the second embodiment of the present invention. At the center of theI/F module 4, a rectangular window is formed. The rectangular window hasa size in which the rectangular signal processing LSI 1 can beaccommodated, when the I/F module 4 is mounted on the interposer 2. Inthe I/F module 4 shown in FIG. 7, an array of the module-site electricjoints (lands) 5 a-5 x around 100 μm²-0.8 mm², corresponding to thearray of interposer-site electric joints (lands) 3 a-3 x around 100μm²-0.8 mm², are arranged as a rectangular geometry around therectangular window. Further, the module-site monitoring terminals(lands) 12 a, 12 b, 12 c and 12 d which are implemented by rectangularpatterns around 100 μm²-0.8 mm² are disposed at the corners of therectangular arrangement of the module-site electric joints (lands) 5 a-5x, corresponding to the interposer-site monitoring terminals (lands) 11a, 11 b, 11 c and 11 d shown in FIG. 6. At the right side corner of theI/F module 4 shown in FIG. 7, a conductive path (short-circuit path) 15a, which electrically connects between the first module-site monitoringterminal 12 a and the second module-site monitoring terminal 12 b at lowimpedance, is shown. And a conductive path (short-circuit path) 15 bwhich electrically connects between the third module-site monitoringterminal 12 c and the fourth module-site monitoring terminal 12 d isshown at the left side corner of the I/F module 4 shown in FIG. 7. Inaddition to the rectangular patterns around 100 μm²-0.8 mm² shown inFIG. 7, circular electrodes around 8 mm^(φ) may be used for themonitoring terminals. The module-site electric joints 5 a-5 x and themodule-site monitoring terminals 12 a, 12 b, 12 c and 11 d may bedelineated as surface electrodes when the surface wirings are delineatedon the I/F module 4. Generally, in the interconnection of the interposer2 and the I/F module 4, a portion of the metallic pattern not requiredto come to the surface for electrical connection is covered with asolder resist film, etc. And because of this, the interposer-siteelectric joints 3 a-3 x, the interposer-site monitoring terminals 11 a,11 b, 11 c, 11 d, the module-site electric joints 5 a-5 x and themodule-site monitoring terminals 12 a, 12 b, 12 c, 12 d are oftenrecessed from the surface level of the solder resist film around 20-50μm. Then, gaps are established between the interposer-site electricjoints 3 a-3 x and the module-site electric joints 5 a-5 x, or betweenthe interposer-site monitoring terminals 11 a, 11 b, 11 c, 11 d, and themodule-site monitoring terminals 12 a, 12 b, 12 c, 12 d, when the jointsand terminals are joined as they are. Therefore, it is desirable thatmetallic films are plated or bumps are formed in the recessed electrode(lands) portion so as to bury the gaps. Or it is desirable that patternsof anisotropic conductive paste or anisotropic conductive sheets areformed in the recessed electrode (lands) portion so as to bury the gaps.Solder balls, gold (Au) bumps, silver (Ag) bumps, cupper (Cu) bumps,nickel-gold (Ni—Au) alloy bumps or nickel-gold-indium (Ni—Au—In) alloybumps, etc. are acceptable for bumps or connection members. An eutecticsolder having a composition ratio such as tin (Sn):lead (Pb)=6:4 with adiameter of 100 μm to 250 μm, height of 50 μm to 100 μm, can be used forthe solder ball. Or, an eutectic solder having a composition ratio ofSn:Pb=5:95 may be used for the solder ball.

The interposer-site electric joints (lands) 3 a-3 x, the module-siteelectric joints 5 a-5 x (lands), the interposer-site monitoringterminals (lands) 11 a, 11 b, 11 c, 11 d and the module-site monitoringterminals (lands) 12 a, 12 b, 12 c, 12 d can be made of metallic films,or metallic thin plates including aluminum (Al), copper (Cu), copperalloys such as Cu—Fe, Cu—Cr, Cu—Ni—Si, Cu—Sn, etc., ferronickel-alloyssuch as Ni—Fe, Fe—Ni—Co, etc. and composite material of copper andstainless steel, etc. In addition, the electric joints and monitoringterminals may be covered by nickel (Ni) plating film and/or gold (Au)plating film, etc. on the surface of the metallic materials.

Then, each of the interposer-site electric joints (lands) 3 a-3 x ismutually and electrically connected to the corresponding module-siteelectric joints 5 a-5 x (lands) by connection members such as bumps.Similarly, each of the interposer-site monitoring terminals (lands) 11a, 11 b, 11 c and 11 d shown in FIG. 6 is mutually and electricallyconnected to the corresponding module-site monitoring terminals (lands)12 a, 12 b, 12 c and 12 d shown in FIG. 7 by connection members.

Each of the interposer-site monitoring terminals (lands) 11 a, 11 b, 11c and 11 d shown in FIG. 6 and the corresponding module-site monitoringterminals (lands) 12 a, 12 b, 12 c and 12 d shown in FIG. 7 serve ascontact monitors for equivalently confirming the electrical connectionby mechanical contact of each of the interposer-site electric joints(lands) 3 a-3 x with the corresponding module-site electric joints(lands) 5 a-5 x.

FIGS. 8A and 8B are cross-sectional views showing the connectingterminals of the LSI package according to the second embodiment of thepresent invention. FIG. 8A is a schematic cross-sectional view of theI/F module 4, taken on a plane perpendicular to the surface of the I/Fmodule 4, the ringed plane running along the ringed array of themodule-site electric joints 5 a-5 x, which are arranged in rectangulartopology around the rectangular window of FIG. 7, and the module-sitemonitoring terminals 12 a, 12 b, 12 c, 12 d which are assigned at twocorners of the rectangular arrangement of the electric joints 5 a-5 x.Similarly, FIG. 8B is a schematic cross-sectional view of the interposer2, cutting off with a ringed plane along the array of interposer-siteelectric joints 3 a-3 x which are arranged in a rectangular topologyaround the signal processing LSI 1 of FIG. 6, and the interposer-sitemonitoring terminals 11 a, 11 b, 11 c, 11 d which are assigned at twocorners of the rectangular arrangement of the electric joints 3 a-3 x.Here, the same or similar reference numerals of FIG. 4 in the LSIpackage according to the first embodiment are applied to the same orsimilar functions. In the configuration of FIGS. 8A and 8B, byconnecting a voltage supply or a current supply to the monitor wiring 13a on the left side of FIG. 8B and by equivalently confirming theelectric contact condition (electrical connection condition) between thesignal processing LSI 1 and the I/F module 4, the monitoring circuit canbe established by a route from the monitor wiring 13 a to the ground(GND) wiring 13 b through the interposer-site monitoring terminal 11 a,the module-site monitoring terminal 12 a, the conductive path(short-circuit path) 15 a, the module-site monitoring terminal 12 b andthe interposer-site monitoring terminal 11 b. Namely, current can besupplied to the monitoring circuit in the above-mentioned configurationwhere one pair of the interposer-site monitoring terminal 11 a and themodule-site monitoring terminal 12 a are electrically connected and theother pair of the module-site monitoring terminal 12 b and theinterposer-site monitoring terminal 11 b are also electricallyconnected. And through monitoring the above-mentioned current condition,it becomes possible to equivalently confirm (monitor) the electricconnection between the interposer-site electric joints 3 a-3 x and themodule-site electric joints 5 a-5 x and to monitor the electric contactcondition.

And by connecting a voltage supply or a current supply, etc. to themonitor wiring 13 c on the opposite side (right side) of theinterposer-site monitoring terminals 11 a and 11 b and by equivalentlyconfirming the electric contact condition between the interposer 2 andthe I/F module 4, the monitoring circuit can be established by a routefrom the monitor wiring 13 c to the ground (GND) wiring 13 d through theinterposer-site monitoring terminal 11 c, the module-site monitoringterminal 12 c, the conductive path (short-circuit path) 15 b, themodule-site monitoring terminal 12 d and the interposer-site monitoringterminal 11 d. Namely, current can be supplied to the monitoring circuiton the right side of FIGS. 8A and 8B in the configuration where one pairof the interposer-site monitoring terminal 11 c and the module-sitemonitoring terminal 12 c on the right side of FIGS. 8A and 8B areelectrically connected and the other pair of the module-site monitoringterminal 12 d and the interposer-site monitoring terminal 11 d on theright side of FIGS. 8A and 8 b are also electrically connected. And aswell as the LSI package according to the first embodiment, throughmonitoring of the electric contact in the monitoring circuit on theright side, simultaneously along with monitoring of the electric contactin the monitoring circuit on the left side, monitoring of the electriccontact condition between the interposer-site electric joints 3 a-3 xand the module-site electric joints 5 a-5 x can be surely realized.

Namely, in the LSI package according to the second embodiment of thepresent invention, for performing operation of the monitoring circuit,it is enough for the LSI package to encompass at least one pair of themodule-connecting terminals (lands) mutually and electricallyshort-circuited among the module-connecting terminals (lands) 3 a-3 x;11 a-11 d on the interposer 2, or at least one pair of theinterposer-connecting terminals (lands) mutually and electricallyshort-circuited among the interposer-connecting terminals (lands) 5 a-5x; 12 a-12 d on the I/F module 4. The pair of monitoring terminals iselectrically connected as part of the monitoring circuit forequivalently confirming the electric contact condition between thesignal processing LSI 1 and the I/F module 4. Therefore, FIG. 7 showsthat a port between the first module-site monitoring terminal 12 a andthe second module-site monitoring terminal 12 b established by simplemetallic film patterns (lands) on the I/F module 4 are electricallyshort-circuited by the conductive path (short-circuit path) 15 a, and aport between the third module-site monitoring terminal 12 c and thefourth module-site monitoring terminal 12 d established by simplemetallic film patterns (lands) of the I/F module 4 are electricallyshort-circuited by the conductive path (short-circuit path) 15 b.

As mentioned above, the configuration of the LSI package according tothe second embodiment is similar to the first embodiment, except for thefeature that the geometry (configuration) of connecting terminals isdifferent; an explanation of other parts which overlap will be omitted.

The feature of the LSI package according to the second embodiment isthat the cost of component materials can be kept to a minimum sincemicro pins and micro sockets are not required and the manufacturingyield is high since there is no destruction of micro pins which iscaused by incomplete insertion of the micro pins.

On the contrary, poor contact (poor connection) because of contaminationof dirt, etc. between the connecting terminals can occur easily, due tothe geometrical feature of the plane electrodes.

In any case, if the failure-causes happen, the LSI package according tothe second embodiment can be immediately repaired when the I/F module ismounted on the interposer 2, because the failures of the electricalconnection can be confirmed in real time.

According to the LSI package of the second embodiment, similar to thefirst embodiment, it is possible to conduct a reflow-process, afterremoving the I/F module 4 from the interposer 2 in a usual manufacturingline. In addition, by making electrical connection between theinterposer 2 and the I/F module 4 through the joining of simple metallicfilm patterns (lands), position controlling accuracy with extremelyhigh-precision is not required, which establishes a comparatively simpleholding mechanism. Since it becomes possible to monitor the electriccontact condition between the interposer 2 and the I/F module 4 by asimple configuration of metallic film patterns, investment in a newmanufacturing line in which the reflow-process is designed so that it isonly possible under specific condition becomes unnecessary. In addition,because a highly precise position controlling technology, a pressuremechanism and a holding mechanism, etc. are unnecessary for theconfiguration of electrical connectors, a significant cost reduction canbe achieved. And further, because such equipment for monitoring poorassembly in electric joints and alarming the degradation of performancesassociated with the passage of time can be attached, an LSI package withlow-cost and high-reliability can be obtained. Therefore, according tothe LSI package of the second embodiment, interconnection betweenhigh-speed chips of the signal processing LSI 1 can be realized at a lowcost, and it becomes possible to promote the upgrading of informationcommunication equipments, etc.

Third Embodiment

As shown in FIGS. 9A and 9B, an LSI package of a third embodiment hassuch a configuration where interposer-site electric joints (firstelectric joints or micro sockets) 3 ao, 3 bo, . . . 3 wo, 3 xo; 3 ai, 3bi, . . . 3 wi, 3 xi are arranged in two arrays at the top surface ofand in an interposer 2, and module-site electric joints (second electricjoints or micro pins) 5 ao, 5 bo, . . . 5 wo, 5 xo; 5 ai, 5 bi, . . . 5wi, 5 xi are arranged in two arrays on an I/F module 4.

FIG. 9A shows part of the enlarged bird's-eye view of the interposer 2in the LSI package of the third embodiment. Though illustration isomitted, similar to FIGS. 1 and 2, a signal processing LSI 1 is mountedon the interposer 2 of FIG. 9A. Then, the interposer-site electricjoints (micro sockets) 3 ao, 3 bo, . . . 3 wo, 3 xo; 3 ai, 3 bi, . . . 3wi, 3 xi are arranged in a double concentric rectangular ring so thatdual arrays of the interposer-site electric joints (micro sockets)surround the signal processing LSI 1 around the peripheral region of theinterposer 2, on which the signal processing LSI 1 is mounted. FIG. 9Aalso shows a configuration in which four interposer-site monitoringterminals (first monitoring terminals or micro sockets) 11 a, 11 b, 11 cand 11 d are assigned in a matrix configuration of 2×2 (two rows by twocolumns) at a corner of the double concentric rectangular ring which areimplemented by the dual arrays of the interposer-site electric joints(micro sockets) 3 ao, 3 bo, . . . 3 wo, 3 xo; 3 ai, 3 bi, . . . 3 wi, 3xi.

FIG. 9B shows part of an enlarged bird's-eye view of the I/F module 4 ofthe LSI package of the third embodiment. Similar to the configuration ofFIG. 3, at the center of the I/F module 4, a rectangular window havingthe size in which the rectangular signal processing LSI 1 can beaccommodated, when the I/F module 4 is mounted on the interposer 2, hasbeen established. In the I/F module 4 shown in FIG. 9B, dual arrays ofthe module-site electric joints 5 ao, 5 bo, . . . 5 wo, 5 xo; 5 ai, 5bi, . . . 5 wi, 5 xi (micro pins), corresponding to the dual arrays ofthe interposer-site electric joints 3 ao, 3 bo, . . . 3 wo, 3 xo; 3 ai,3 bi, . . . 3 wi, 3 xi have been arranged as a double concentricrectangular ring around the rectangular window. By mechanical contact ofeach of the dual arrays of the interposer-site electric joints 3 ao, 3bo, . . . 3 wo, 3 xo; 3 ai, 3 bi, . . . 3 wi, 3 xi and the correspondingdual arrays of the module-site electric joints 5 ao, 5 bo, . . . 5 wo, 5xo; 5 ai, 5 bi, . . . 5 wi, 5 xi, the interposer 2 and the I/F module 4are mutually and electrically connected. FIG. 9B also shows aconfiguration in which four module-site monitoring terminals (secondmonitoring terminals or micro pins) 12 a, 12 b, 12 c and 12 d, whichcorrespond to the interposer-site monitoring terminals 11 a, 11 b, 11 cand 11 d of FIG. 9A, are assigned in a matrix configuration of 2×2 at acorner of the double concentric rectangular ring which are implementedby the dual arrays of the module-site electric joints (micro pins) 5 ao,5 bo, . . . 5 wo, 5 xo; 5 ai, 5 bi, . . . 5 wi, 5 xi.

At the corner of the I/F module 4 shown in FIG. 9B, a first conductivepath (short-circuit path) 15 a, which electrically connects between themodule-site monitoring terminals 12 a and 12 d at low impedance, isshown. And a second conductive path (short-circuit path) 15 b, whichelectrically connects between the interposer-site monitoring terminals12 b and 12 c, are also shown in FIG. 9B. On the while, at the corner ofthe interposer 2 shown in FIG. 9A, a third short circuit path 16, whichelectrically connects between the interposer-site monitoring terminals(micro sockets) 11 a and 11 b is shown. In this manner, the LSI packageaccording to the third embodiment of the present invention, forperforming operation of the monitoring circuit, employs such a topologythat at least one pair of the interposer-site monitoring terminals(micro sockets) is mutually and electrically short-circuited among fourinterposer-site monitoring terminals 11 a, 11 b, 11 c and 11 d on theinterposer 2 and that at least one pair of the module-site monitoringterminals (micro pins) is mutually and electrically short-circuitedamong four module-site monitoring terminals 12 a, 12 b, 12 c and 12 d onthe I/F module 4. FIG. 9B shows a topology where two pairs of monitoringterminals 12 b and 12 c at a first column and 12 a and 12 d at a secondcolumn are electrically short-circuited among four module-sitemonitoring terminals 12 a to 12 d, implementing a matrix of 2×2 (tworows by two columns). As mentioned above, it is enough for the LSIpackage to make at least one pair of the module-connecting terminals(micro sockets) is mutually and electrically short-circuited among themodule-connecting terminals (micro sockets) 3 a-3 x; 11 a-11 d on theinterposer 2, or at least one pair of the interposer-connectingterminals (micro sockets) is mutually and electrically short-circuitedamong the interposer-connecting terminals (micro sockets) 5 a-5 x; 12a-12 d on the I/F module 4 so as to achieve operation of the monitoringcircuit, and the pair of monitoring terminals is electrically connectedas part of the monitoring circuit for equivalently confirming theelectric contact condition (electrical connection condition) between thesignal processing LSI 1 and the I/F module 4.

Each of the interposer-site monitoring terminals 11 a, 11 b, 11 c and 11d of FIG. 9A, which are arranged in a matrix configuration of 2×2 on theinterposer 2, and each of the corresponding module-site monitoringterminals (micro pins) 12 a, 12 b, 12 c and 12 d of FIG. 9B, which arearranged in a matrix configuration of 2×2 on the I/F module 4, are themonitoring terminals for equivalently confirming the electric contactcondition by mechanical contact between each of the dual arrays of theinterposer-site electric joints 3 ao, 3 bo, . . . 3 wo, 3 xo; 3 ai, 3bi, . . . 3 wi, 3 xi and the corresponding dual arrays of themodule-site electric joints 5 ao, 5 bo, . . . 5 wo, 5 xo; 5 ai, 5 bi, .. . 5 wi, 5 xi.

As shown in FIGS. 9A and 9B, since there are dual arrays of theinterposer-site electric joints 3 ao, 3 bo, . . . 3 wo, 3 xo; 3 ai, 3bi, . . . 3 wi, 3 xi and the corresponding dual arrays of themodule-site electric joints 5 ao, 5 bo, . . . 5 wo, 5 xo; 5 ai, 5 bi, .. . 5 wi, 5 xi, according to a methodology employing the configurationshown in FIGS. 1 to 4, whether the dual arrays have been joined properlyor not occurs sometimes and is caused by the relative shift of theopposing terminals. Namely, when an equivalent short conductive path isformed in an adjacent column by the relative shift of the opposingterminals, it cannot be distinguished whether the current is supplied bythe monitoring circuit or an unintentional short-circuit failure of theconductive path due to the adjacent column.

Therefore, for preventing an erroneous judgment due to the relativeshift of the opposing terminals in the dual array, as shown in FIG. 9B,the first conductive path (short-circuit path) 15 a and the secondconductive path (short-circuit path) 15 b are assigned at the corner ofthe I/F module 4, spanning to cover two columns in the double concentricrectangular ring arrangement of the module-site electric joints 5 ao, 5bo, . . . 5 wo, 5 xo; 5 ai, 5 bi, . . . 5 wi, 5 xi. And at the sametime, for preventing the erroneous judgment, as shown in FIG. 9A, thethird conductive path (short-circuit path) 16 is assigned at the cornerof the interposer 2, spanning two columns of the double concentricrectangular ring arrangement of the interposer-site electric joints 3ao, 3 bo, . . . 3 wo, 3 xo; 3 ai, 3 bi, . . . 3 wi, 3 xi.

In FIGS. 9A and 9B, a monitoring circuit is formed by a route from themonitor wiring 13 c to the ground (GND) wiring 13 d through theinterposer-site monitoring terminal 11 c, the module-site monitoringterminal 12 c, the second conductive path (short-circuit path) 15 b, themodule-site monitoring terminal 12 b and the interposer-site monitoringterminal 11 b, the third conductive path (short-circuit path) 16, theinterposer-site monitoring terminal 11 a, the module-site monitoringterminal 12 a, the first conductive path (short-circuit path) 15 a, themodule-site monitoring terminal 12 d and the interposer-site monitoringterminal 11 d. According to the circuit route mentioned above, itbecomes possible to detect an abnormality due to the situation by whichthe opposing arrays are relatively shifted, since the monitoring circuitbecomes an open-circuit by the relative shift of the opposing arrays.

Modification of Third Embodiment

A similar monitoring circuit can be established by a configurationspanning three columns of the electric joints in the double concentricrectangular ring as shown in FIGS. 10A and 10B. In FIG. 10A, theinterposer-site electric joints (first electric joints) 3 xo and 3 xi atthe third column are used for the additional monitoring terminals. Anadditional conductive path (short-circuit path) 17 is formed between theinterposer-site electric joint 3 xi at the third column and theinterposer-site monitoring terminal (first monitoring terminal) 11 d atthe second column. The additional conductive path (short-circuit path)17 faces a row in which the third conductive path (short-circuit path)16 between the first and second columns is formed so as to implement azigzag configuration with the conductive path (short-circuit path) 16.Although the feature that a monitor wiring 13 a is connected to aninterposer-site electric joint 11 c of the first column is similar tothe configuration shown in FIG. 9A, a ground wiring 13 d is connectedbetween the interposer-site electric joint 3 xo and GND in amodification of the third embodiment shown in FIG. 10A.

In FIG. 10B, the module-site electric joints (second electric joints) 5xo and 5 xi at the third column are used for the monitoring terminalsand an additional conductive path (short-circuit path) 15 c is assignedbetween the module-site electric joint 5 xo and 5 xi so that themonitoring circuit can extend one column ahead of the conductive path(short-circuit path) 15 a, so as to establish a zigzag route with theconductive path (short-circuit path) 15 a.

According to the modification of the third embodiment shown in FIGS. 10Aand 10B, a monitoring circuit is formed by a route from the monitorwiring 13 c to the ground (GND) wiring 13 d through the interposer-sitemonitoring terminal (first monitoring terminal) 11 c, the module-sitemonitoring terminal (second monitoring terminal) 12 c, the secondconductive path (short-circuit path) 15 b, the module-site monitoringterminal (second monitoring terminal) 12 b and the interposer-sitemonitoring terminal (first monitoring terminal) 11 b, the thirdconductive path (short-circuit path) 16, the interposer-site monitoringterminal (first monitoring terminal) 11 a, the module-site monitoringterminal (second monitoring terminal) 12 a, the first conductive path(short-circuit path) 15 a, the module-site monitoring terminal (secondmonitoring terminal) 12 d, the interposer-site monitoring terminal(first monitoring terminal) 11 d, the additional conductive path(short-circuit path) 17, the interposer-site monitoring terminal (firstmonitoring terminal) 3 xi, the module-site monitoring terminal (secondmonitoring terminal) 5 xi, the additional conductive path (short-circuitpath) 15 c, the module-site monitoring terminal (second monitoringterminal) 5 xo and the interposer-site monitoring terminal (firstmonitoring terminal) 3 xo. By the three columns configuration shown inFIGS. 10A and 10B, a monitoring circuit, which can achieve effectivenesssimilar to the circuit implemented by two columns shown in FIGS. 9A and9B, can be established.

Developing the configuration shown in FIGS. 10A and 10B, theinterposer-site electric joints and the module-site electric joints canbe arranged in three arrays so as to implement a triple concentricrectangular ring surrounding the signal processing LSI 1. In the tripleconcentric rectangular ring configuration, the rows and columns can beorthogonally exchanged from the topology shown in FIGS. 10A and 10B.

Further, by employing in the same manner, a configuration spanning overfour columns as well as the configuration spanning three columns, amonitoring circuit can be accomplished.

According to the LSI packages of the third embodiment and themodification of the third embodiment, similar to the first and thesecond embodiments, it is possible to conduct a reflow-process, afterremoving the I/F module 4 from the interposer 2 in a usual manufacturingline. In addition, by making electrical connection between theinterposer 2 and the I/F module 4 through mechanical contact using aconfiguration having a plurality of arrays of the electric joints so asto form a multi-concentric rectangular ring topology over the doubleconcentric rectangular ring, because position controlling accuracy withextremely high-precision is not required, the multi-concentricrectangular ring topology can facilitate a comparatively simple holdingmechanism. Since it becomes possible to monitor the electric contactcondition between the interposer 2 and the I/F module 4 with a simplematrix configuration of over two columns of the electric joints in themulti-concentric rectangular ring, investment in a new manufacturingline in which the reflow-process is designed so that it is only possibleunder specific condition becomes unnecessary. In addition, becausemechanical mechanisms such as a high-precision inserting mechanism, apressure mechanism and a holding mechanism are unnecessary for themulti-concentric rectangular ring configuration of electricalconnectors, a significant reduction in the cost can be achieved. Andfurther, because various units such as a monitoring unit configured tomonitor poor assembly in electric joints and an alarming unit configuredto alarm the degradation of performance associated with the passage oftime can be attached, an LSI package with low-cost and high-reliabilitycan be obtained.

Therefore, according to the LSI packages of the third embodiment and themodification of the third embodiment, interconnection between high-speedchips of the signal processing LSI 1 can be realized at a low cost, andit becomes possible to promote the upgrading of informationcommunication equipment, etc.

Fourth Embodiment

In the LSI packages according to the first to third embodiments, thepower supplying circuit and the detection circuit for the monitoringcircuits are not specified. The detection circuit can be facilitated,for instance, by surface interconnections delineated on the printedwiring board 8, which may be connected to the monitor wirings 13 a and13 c through through-holes formed in the interposer 2, and connected todetection terminals, which are configured to connect an externaldetection circuit, arranged on the printed wiring board 8.Alternatively, the power supplying circuit and the detection circuit canbe established on the printed wiring board 8, which are connected to themonitor wirings 13 a and 13 c through through-holes formed in theinterposer 2 and surface interconnections delineated on the printedwiring board 8.

As shown in FIG. 11, in the LSI package according to a fourthembodiment, a conduction confirmation circuit 202 having a function ofconfirming electrical conduction, is integrated in a signal processingLSI 1. The conduction confirmation circuit 202 of DC conduction type,shown in FIG. 11 includes a status signal generator 203 implemented by acomparator configured to receive a divided voltage (=Vcc/2) of a supplyvoltage Vcc, which is divided by a voltage divider consisting of tworesistors Rs connected in series, at one input terminal and to receive areference voltage Vref at the other input terminal.

In FIG. 11, current can flow through an I/O terminal 211 of theconduction confirmation circuit 202, under a condition where gapsbetween an interposer-site monitoring terminal (a first interposer-sitemonitoring terminal) 11 a and a module-site monitoring terminal (a firstmodule-site monitoring terminal) 12 a, and between a module-sitemonitoring terminal (a second module-site monitoring terminal) 12 b andan interposer-site monitoring terminal (a second interposer-sitemonitoring terminal) 11 b and are electrically connected simultaneously.As shown in FIG. 11, as the second module-site monitoring terminal 11 bis connected to a ground wiring, the potential of the I/O terminal 211becomes “L” level by the conduction of current. Comparing “L” level withthe reference voltage Vref, the status signal generator (comparator) 203delivers a first status signal “L” (alternatively “H”) when the currentis normal from a status signal output terminal 204.

On the contrary, in FIG. 11, because current does not flow through theI/O terminal 211 of the conduction confirmation circuit 202, if theelectrical connections between the first interposer-site monitoringterminal 11 a and/or the first module-site monitoring terminal 12 a, andbetween the second module-site monitoring terminal 12 b and the secondinterposer-site monitoring terminal 11 b are poor, the potential of theI/O terminal 211 does not become “L” level, keeping approximately avalue of Vcc/2, which is obtained across the lower resistor Rs in anetwork of the voltage divider consisting of the upper and lowerresistors Rs connected in series so as to divide the supply value Vcc bytwo. Comparing the level of a value approximately the same as Vcc/2 withthe reference voltage Vref, the status signal generator (comparator) 203delivers a second status signal “H” (alternatively “L”), when theelectrical connection is abnormal, from the status signal outputterminal 204.

With “a monitoring path resistance Rc”, which is a total resistance of aconductive route, or a current path from the monitor wiring 13 a to theground (GND) wiring 13 b, through the first interposer-site monitoringterminal 11 a, the first module-site monitoring terminal 12 a, theconductive path (short-circuit path) 15 a, the second module-sitemonitoring terminal 12 b and the second interposer-site monitoringterminal 11 b, voltage Vc, which is fed to one of the input terminals ofthe status signal generator (comparator) 203 a, is given by:Vc=Vcc/(2+Rs/Rc)   (1)

Detection of the relationship Vc<Vref, Vc>Vref is equivalent to amonitoring of the variation of the monitoring path resistance Rc of Eq.(1). In case of Rc=∞ (non-conduction), it becomes Vc=Vcc/2 (Vc>Vref),and in case of Rc=0.01Ω (conduction), it becomes Vc˜Vcc/100000 (Vc<Vre),assuming the value of Rs=1 kΩ.

In this manner, the conduction confirmation circuit 202 can equivalentlyconfirm (monitor) whether the electric contact (electrical connection)between interposer-site electric joints 3 a-3 x and module-site electricjoints 5 a-5 x is good or not, by observing the potential at the I/Oterminal 211 so as to provide a first status signal “L” (alternatively“H”) for a normal condition of the electric contact from the statussignal output terminal 204 and a second status signal “H” (alternatively“L”) for a poor condition of the electric contact.

As shown in FIG. 11, by integrating the conduction confirmation circuit202 having a function of electrical connection monitoring in the signalprocessing LSI 1, an increase in the number of circuit components X_(ij)can be suppressed in the LSI package of the fourth embodiment. In otherwords, according to the LSI package of the fourth embodiment, whilemanaging not to increase the manufacturing cost of the printed wiringboard 8, it is possible to alarm the system of the LSI package, afterdetecting poor contact (poor connection) within the signal processingLSI 1.

Additional circuits to be integrated in the signal processing LSI 1 canbe implemented by circuits of a very small scale, and generally theaddition of such small-scale circuits to the signal processing LSI 1does not serve as a cost-increasing factor to the signal processing LSI1.

Although the DC conductive type circuit such as the circuit shown inFIG. 11 can be acceptable for the monitoring circuit of the signalprocessing LSI 1, the DC conductive type circuit has problems ofmalfunction by noise superposition and an increase in the standby power.

To overcome the problems of malfunction by noise superposition and anincrease in the standby power, a conduction confirmation circuit 202 ofa loop-back type shown in FIG. 12 may be integrated in the signalprocessing LSI 1. The conduction confirmation circuit 202 of a loop-backtype, shown in FIG. 12 includes a buffer amplifier 205 configured toamplify a monitoring pulse and an AND circuit 203 b configured to acceptan output from the buffer amplifier 205 at the first input terminal andto accept a returning signal (loopback pulse) through a monitor wiring13 c from the interposer 2 at the second input terminal.

In FIG. 11, the output of the buffer amplifier 205 is transmitted to thefirst interposer-site monitoring terminal 11 a through an outputterminal 212 and is simultaneously delivered to the first input terminalof the AND circuit 203 b

The monitoring pulse which was transmitted through the output terminal212 returns to the second input terminal of the AND circuit in theconduction confirmation circuit 202 through an input terminal 213, ifgaps between a first interposer-site monitoring terminal 11 a and afirst module-site monitoring terminal 12 a, and between a secondmodule-site monitoring terminal 12 b and a second interposer-sitemonitoring terminal 11 b are electrically connected. By taking Booleanproduct operation (AND) between a returning signal (loop back pulse)through a monitor wiring 13 c from the interposer 2 at the second inputterminal and the monitoring pulse received at the first input terminalof the AND circuit 203 b, the conduction confirmation circuit 202 of aloop back type delivers a first status signal “L” (alternatively “H”)for a normal condition of the electric contact from the status signaloutput terminal 204.

On the contrary, in FIG. 12, because a signal (loop back pulse)returning through the monitor wiring 13 c from the interposer 2 throughthe input terminal 213 does not exist, if electrical connection is poorbetween the first interposer-site monitoring terminal 11 a and the firstmodule-site monitoring terminal 12 a, or between the second module-sitemonitoring terminal 12 b and the second interposer-site monitoringterminal 11 b, the conduction confirmation circuit 202 of a loop backtype delivers a second status signal “H” (alternatively “L”) for anabnormal condition of the electric contact (electrical connection) fromthe status signal output terminal 204.

In this manner, the AND circuit 203 b serves as a status signalgenerator (comparator), which delivers a first status signal “L”(alternatively “H”) for a normal condition of the electric contact fromthe status signal output terminal 204 and delivers a second statussignal “H” (alternatively “L”) for an abnormal condition of the electriccontact from the status signal output terminal 204.

Also a method of transmitting a sequence of monitoring pulsesperiodically, and detecting the current associated with the monitoringpulses may be acceptable for the monitoring circuit.

Fifth Embodiment

A signal processing LSI 1 of an LSI package according to a fifthembodiment of the present invention, integrates an I/O controller 301configured to block transmission and reception of signals to and fromthe I/F module 4 when poor contact (poor connection) is detected, inaddition to the conduction confirmation circuit 202 merged in the signalprocessing LSI 1 of the LSI package of the fourth embodiment. Namely,when electrical connection is poor, not only the signals transmitted tothe I/F module 4 cannot make sense, but also damage to the whole systemmay be caused by malfunction of the I/F module 4 ascribable to thesignals transmitted to the I/F module 4.

Therefore, in the signal processing LSI 1 of the LSI package of thefifth embodiment, the I/O controller 301, which can be monolithicallyintegrated in the same chip with the conduction confirmation circuit202, will be explained. The I/O controller 301 can perform a fail-safefunction of quickly blocking the transmission and reception of signalsto and from the I/F module 4, when poor contact is detected, alarmingthe occurrence of poor contact to the system of the LSI package, andstoring temporally system data into predetermined memory to protectdamages, etc., using an output signal delivered from the status signaloutput terminal 204 in the conduction confirmation circuit 202integrated in the signal processing LSI 1, which is already explained inthe fourth embodiment

Such a circuit as shown in FIG. 13, for example, having a function ofblocking transmission and reception of signals to and from the I/Fmodule 4 by decreasing supply voltage of output buffer circuits below arequired value for the operation of the output buffer circuits, may beadopted for the I/O controller 301. The I/O controller 301 shown in FIG.13 has a plurality of input/output (I/O) buffers 207 a, 207 b, 207 c, .. . each of which is connected to the corresponding I/O terminals 208 a,208 b, 208 c, . . . . The I/O buffers 207 a, 207 b, 207 c, . . . areconnected in parallel between a power supply switch SW and the groundrespectively. The power supply switch SW shown in FIG. 13 is anequivalent circuit represented by a symbol and various switchingelements such as semiconductor active elements are acceptable for thepower supply switch SW actually.

The power supply switch SW of the I/O controller 301 connects powersupply terminals of the I/O buffers 207 a, 207 b, 207 c, . . . to aterminal of supply voltage Vcc for operation of signal I/O buffering,alternatively to a terminal of ground for prohibiting the operation ofthe I/O buffers 207 a, 207 b, 207 c, . . . , corresponding to the statussignals SST from the status signal output terminal 204 of the conductionconfirmation circuit 202, which was explained in the fourth embodiment.

Alternatively, as shown in FIG. 14, the I/O controller 301 configured toblock transmission and reception of signals by gate circuits(combinational logic elements) implementing the output buffer circuitsmay be acceptable for the switch. The I/O controller 301 shown in FIG.14 has a plurality of AND circuits 206 a, 206 b, 206 c, . . . as the I/Obuffers, each of which has two input terminals and an output terminalwhich is connected to the corresponding I/O terminals 208 a, 208 b, 208c, . . . . The first input terminal of each of the AND circuits 206 a,206 b, 206 c, . . . is connected to the power supply switch SWrespectively. Similar to FIG. 13, the power supply switch SW shown inFIG. 14 is an equivalent circuit represented by a symbol and variousswitching elements such as semiconductor active elements are acceptablefor the power supply switch SW actually. The second input terminal ofeach of the AND circuits 206 a, 206 b, 206 c, . . . is connected to aninternal circuit of the signal processing LSI 1. The power supply switchSW of the I/O controller 301 connects one of the input terminals of theAND circuits 206 a, 206 b, 206 c, . . . to a terminal of supply voltageVcc for feeding “H” so as to enable operation of signal I/O buffering,alternatively to a terminal of ground for feeding “L” so as to disenablethe operation of the I/O buffers 206 a, 206 b, 207 c, . . . ,corresponding to the status signals SST from the status signal outputterminal 204 of the conduction confirmation circuit 202.

Other Embodiment

Various modifications will become possible for those skilled in the artafter receiving the teachings of the present disclosure withoutdeparting from the scope thereof. For example, the signal processing LSI1 mounted on the interposer 2, is not limited to the signal processingLSIs 1 which are explained in the first to fifth embodiments. There isno limitation on the signal processing LSI 1 to be mounted on theinterposer 2, as long as the signal processing LSI 1 can facilitateoperation of the I/F module 4, and the I/F module 4 can facilitateoperation of the signal processing LSIs 1. Although, in FIGS. 1, 2 and 6etc, configurations are in which a single signal processing LSI 1 ismounted on the interposer 2, another configuration whereby a pluralityof signal processing LSIs 1 are mounted on a same interposer 2 may beacceptable for the LSI package.

When a plurality of signal processing LSIs 1 are mounted on theinterposer 2, in such a configuration with a plurality of I/F modules 4,the number of the I/F modules 4 corresponds to the number of the signalprocessing LSIs, is adapted to each of the signal processing LSIs.Alternatively, the plurality of signal processing LSIs 1 can beaccommodated in a single I/F module 4, in which a plurality ofconcavities or openings are established, and the number of theconcavities or openings corresponds to the number of signal processingLSIs. And when a plurality of signal processing LSIs 1 are mounted onthe interposer 2, the conduction confirmation circuit 202 explained inthe forth embodiment and the I/O controller 301 explained in the fifthembodiment can be integrated in different LSI chips.

In addition, in the fourth embodiment, the conduction confirmationcircuit 202 of the DC conductive type shown in FIG. 11 and theconduction confirmation circuit 202 of the loop-back type are assumed tobe integrated monolithically in the signal processing LSI 1. However,the conduction confirmation circuits 202 of the DC conductive type andloop-back type can be implemented by hybrid integrated circuits using aplurality of circuit components X_(ij) (“i” and “j” are integersrespectively, each representing a position in a matrix) arranged on theprinted wiring board 8, as shown in FIG. 1. Furthermore, to alarm a poorelectrical contact, a red LED attached on to the printed wiring board 8can be employed, using an output signal delivered from the status signaloutput terminal 204 of the conduction confirmation circuit 202 shown inFIG. 11 or FIG. 12.

Further, for a poor electrical contact, it is effective to add ablocking function of signals to and from the I/F module 4 in the firstto fifth embodiments, similar to the blocking function of signals to andfrom the signal processing LSIs 1, mentioned in the fifth embodiment.Namely, the addition of the blocking function has effectiveness inpreventing malfunction of the other I/F module which is connected aheadof the transmission line and an unexpected operation of the other I/Fmodule caused by abnormal data. To establish the blocking function ofsignals to and from the I/F module 4, the I/O controller 301 explainedin the fifth embodiment can be mounted or integrated in the I/F module4.

Besides, technical features such as configurations, materials andmethods of arrangement of electric joints, monitoring terminals arefundamentally not limited to the disclosure in the first to fifthembodiments, because the LSI packages disclosed in the first to fifthembodiments are mere examples. Thus, the present invention of courseincludes various embodiments and modifications and the like which arenot detailed above. Therefore, the scope of the present invention willbe defined in the following claims.

1. An interposer included in an LSI package, the LSI package furtherincluding a signal processing LSI mounted on the interposer and aninterface module having a transmission line configured to establish anexternal interconnection of signal, which is transmitted through theinterposer, the interposer comprising: a plurality of module-connectingterminals configured to mechanically and electrically connect with aplurality of interposer-connecting terminals provided on the interfacemodule, part of the module-connecting terminals are assigned asmonitoring terminals, through which a monitoring current to confirmelectrical connection between the module-connecting terminals and theinterposer-connecting terminals flows.
 2. The interposer of claim 1,wherein at least one pair of the module-connecting terminals aremutually short-circuited as first monitoring terminals serving aselements of a monitoring circuit, which monitors the electricalconnection between the signal processing LSI and the interface module.3. The interposer of claim 1, wherein a plurality of separated areas areprovided, the first monitoring terminals are disposed in each of theseparated areas, so as to provide a plurality of monitoring circuits. 4.An interface module included in an LSI package, the LSI package furtherincluding a signal processing LSI and an interposer mounting the signalprocessing LSI, the interface module having a transmission lineconfigured to establish an external interconnection of signal, which istransmitted through the interposer, the interface module comprising: aplurality of interposer-connecting terminals configured to mechanicallyand electrically connect with a plurality of module-connecting terminalsprovided on the interposer, part of the interposer-connecting terminalsare assigned as monitoring terminals, through which a monitoring currentto confirm electrical connection between the signal processing LSI andthe interface module flows.
 5. The interface module of claim 4, furthercomprising a circuit configured to block transmission and reception ofsignals to and from external interconnection when poor connection isdetected between the interposer-connecting terminals and themodule-connecting terminals.
 6. The interface module of claim 4, whereinat least one pair of the interposer-connecting terminals are mutuallyshort-circuited as the second monitoring terminals serving as elementsof a monitoring circuit, which monitors the electrical connectionbetween the signal processing LSI and the interface module.
 7. Theinterface module of claim 5, wherein a plurality of separated areas areassigned on the interface module, the monitoring terminals are disposedrespectively in the separated areas, so as to provide a plurality ofmonitoring circuits.
 8. A monitoring circuit of an LSI package includinga signal processing LSI, an interposer mounting the signal processingLSI and an interface module having a transmission line configured toestablish an external interconnection of signal, which is transmittedthrough the interposer, configured to monitor electrical connectionbetween the signal processing LSI and the interface module, themonitoring circuit comprising: a conduction confirmation circuitconfigured to confirm the electrical connection by providing a firststatus signal when resistance in a current path from the signalprocessing LSI, through the interposer, to the interface module issmaller than a predetermined value, and a second status signal when theresistance is larger than the predetermined value.
 9. The monitoringcircuit of claim 8, wherein the resistance includes a resistance of acurrent path from a first interposer-site monitoring terminal, a firstmodule-site monitoring terminal configured to be connected with thefirst interposer-site monitoring terminal, a short-circuit pathconnected with the first module-site monitoring terminal in theinterface module, a second module-site monitoring terminal connectedwith the short-circuit path in the interface module and a secondinterposer-site monitoring terminal configured to be connected with thesecond module-site monitoring terminal.
 10. A monitoring circuit of anLSI package including a signal processing LSI, an interposer mountingthe signal processing LSI and an interface module having a transmissionline configured to establish external interconnection of a signal, whichis transmitted through the interposer, configured to confirm electricalconnection between the signal processing LSI and the interface module,the monitoring circuit comprising: a conduction confirmation circuitconfigured to confirm the electrical connection by providing a firststatus signal when a monitoring pulse provided by the signal processingLSI is returned through a current path from the signal processing LSI,through the interposer, to the interface module and a second statussignal when the monitoring pulse is not returned from the current path.11. A signal processing LSI to be included in an LSI package, the LSIpackage further including an interposer mounting the signal processingLSI, an interface module having a transmission line configured toestablish an external interconnection of signal, which is transmittedthrough the interposer, and a monitoring circuit configured to monitorelectrical connection between the signal processing LSI and theinterface module, the signal processing LSI comprising: a conductionconfirmation circuit configured to confirm the electrical connection byproviding a first status signal when the electrical connection in acurrent path from the signal processing LSI, through the interposer, tothe interface module is normal, and a second status signal when theelectrical connection is abnormal.
 12. The signal processing LSI ofclaim 2, further comprising an input/output controller configured tocontrol transmission and reception of signals to and from the interfacemodule, by blocking the signals when poor connection is detected in thecurrent path.